Whether the discussion is about smart manufacturing or digital transformation, one of the biggest conversations in the semiconductor industry today centers on the tremendous amount of data fabs ...
Photo-induced force microscopy (PiFM) is a sophisticated nanoscale characterization approach that combines the elevated spatial resolution of atomic force microscopy (AFM) with infrared (IR) ...
In this review we discuss two recent CnCV metrology advancements, namely: 1. enhancement of throughput and 2. use of electrical defect mapping for yield prediction. Novel 10x faster measurements of ...